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Beyond ZrO2: Rutile TiO2 as the Dielectric Platform for Next-Generation DRAM Capacitors

구분 : International Journal 저자 : 김성근 게재년월 : 2026.02 게재지 : ACS Applied Electronic Materials

Beyond ZrO2: Rutile TiO2 as the Dielectric Platform for Next-Generation DRAM Capacitors